Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
ISSN 1027-4510 (Print)
ISSN 1819-7094 (Online)
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Keywords
Raman spectroscopy
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
atomic-force microscopy
channeling
ion implantation
magnetron sputtering
microhardness
microstructure
neutron diffraction
scanning electron microscope
scanning electron microscopy
silicon
simulation
small-angle neutron scattering
structure
surface
surface morphology
synchrotron radiation
thin films
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Keywords
Raman spectroscopy
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
atomic-force microscopy
channeling
ion implantation
magnetron sputtering
microhardness
microstructure
neutron diffraction
scanning electron microscope
scanning electron microscopy
silicon
simulation
small-angle neutron scattering
structure
surface
surface morphology
synchrotron radiation
thin films
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Author Details
Author Details
Ksenich, S. V.
Issue
Section
Title
File
Vol 10, No 4 (2016)
Article
The effect of silicon-substrate orientation on the local piezoelectric characteristics of LiNbO
3
films
Vol 11, No 3 (2017)
Article
Influence of annealing temperature and its atmosphere on the properties of zinc implanted silicon
Vol 12, No 5 (2018)
Article
Modification of Zinc-Implanted Silicon by Swift Xenon Ion Irradiation
Vol 13, No 4 (2019)
Article
Computer Analysis of AFM Images of a Silicon Surface Implanted with Zinc Ions and Oxidized at Elevated Temperatures
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