Author Details

Chkhalo, N. I.

Issue Section Title File
Vol 11, No 1 (2017) Article Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences
Vol 11, No 3 (2017) Article The effect of bombardment with neutralized neon ions on the roughness of a fused silica and beryllium surface
Vol 11, No 3 (2017) Article Application of cluster beams for the physics and technologies of microstructures
Vol 12, No 5 (2018) Article Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes
Vol 12, No 6 (2018) Article Current State of Development of a Microscope Operating at a Wavelength of 3.37 nm at the Institute of Physics of Microstructures of the Russian Academy of Sciences
Vol 13, No 1 (2019) Article Set of Multilayer X-Ray Mirrors for a Double-Mirror Monochromator Operating in the Wavelength Range of 0.41–15.5 nm
Vol 13, No 1 (2019) Article Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors
Vol 13, No 2 (2019) Article Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers
Vol 13, No 2 (2019) Article On the Possibilities of Multilayer Mirrors for Measuring the Concentration of Boron Impurities in Diamond
Vol 13, No 2 (2019) Article Miniature Ion Source KLAN-10M with a Plasma Neutralizer
Vol 13, No 2 (2019) Article Aperiodic Mirrors Based on Multilayer Beryllium Systems
Vol 13, No 5 (2019) Article Modular Device for the Formation and Study of Cluster Beams of Inert and Molecular Gases