| Issue | 
	Section | 
        Title | 
	File | 
											
				| Vol 11, No 1 (2017) | 
		Article | 
		Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences | 
		
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				| Vol 11, No 3 (2017) | 
		Article | 
		The effect of bombardment with neutralized neon ions on the roughness of a fused silica and beryllium surface | 
		
					 | 
		
												
				| Vol 11, No 3 (2017) | 
		Article | 
		Application of cluster beams for the physics and technologies of microstructures | 
		
					 | 
		
												
				| Vol 12, No 5 (2018) | 
		Article | 
		Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes | 
		
					 | 
		
												
				| Vol 12, No 6 (2018) | 
		Article | 
		Current State of Development of a Microscope Operating at a Wavelength of 3.37 nm at the Institute of Physics of Microstructures of the Russian Academy of Sciences | 
		
					 | 
		
												
				| Vol 13, No 1 (2019) | 
		Article | 
		Set of Multilayer X-Ray Mirrors for a Double-Mirror Monochromator Operating in the Wavelength Range of 0.41–15.5 nm | 
		
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				| Vol 13, No 1 (2019) | 
		Article | 
		Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors | 
		
					 | 
		
												
				| Vol 13, No 2 (2019) | 
		Article | 
		Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers | 
		
					 | 
		
												
				| Vol 13, No 2 (2019) | 
		Article | 
		On the Possibilities of Multilayer Mirrors for Measuring the Concentration of Boron Impurities in Diamond | 
		
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				| Vol 13, No 2 (2019) | 
		Article | 
		Miniature Ion Source KLAN-10M with a Plasma Neutralizer | 
		
					 | 
		
												
				| Vol 13, No 2 (2019) | 
		Article | 
		Aperiodic Mirrors Based on Multilayer Beryllium Systems | 
		
					 | 
		
												
				| Vol 13, No 5 (2019) | 
		Article | 
		Modular Device for the Formation and Study of Cluster Beams of Inert and Molecular Gases | 
		
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