Features of the Initial Growth Stages of ZnO Films on the Rhombohedral Plane of Sapphire


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Abstract

The initial growth stages of (11\(\bar {2}\)0) ZnO films on the rhombohedral plane of sapphire are studied. Grains of parasitic orientations are found to form at early growth stages. The pre-growth annealing of sapphire substrates at temperatures above 1000°C results in suppression of the growth of these grains. The presence of round and polygonal grains in (11\(\bar {2}\)0) ZnO films is explained from the standpoint of the cluster-growth mechanism.

About the authors

A. E. Muslimov

Federal Scientific Research Center “Crystallography and Photonics”, Shubnikov Institute of Crystallography,
Russian Academy of Sciences

Author for correspondence.
Email: amuslimov@mail.ru
Russian Federation, Moscow, 119333

A. M. Ismailov

Dagestan State University

Email: amuslimov@mail.ru
Russian Federation, Makhachkala, 367000

V. A. Babaev

Dagestan State University

Email: amuslimov@mail.ru
Russian Federation, Makhachkala, 367000

V. M. Kanevsky

Federal Scientific Research Center “Crystallography and Photonics”, Shubnikov Institute of Crystallography,
Russian Academy of Sciences

Email: amuslimov@mail.ru
Russian Federation, Moscow, 119333

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