Monte Carlo Method in Scanning Electron Microscopy. 3. Modern Condition of the Problem

Abstract

The applicability of the Monte Carlo method for modeling images obtained in a scanning electron microscope is assessed. It is shown that in the Monte Carlo method, it is impossible to take into account all the mechanisms of the interaction of electrons with matter that affect image formation. Modern random-number generators create an insufficient amount of random numbers necessary for modeling the scattering of electrons in matter. The time it takes to modeling images using contemporary personal computers is too long: it takes years of continuous computer operation. There is no evidence of correctness of the results of the Monte Carlo method when generating images. These factors prove the impossibility of using the Monte Carlo method to modeling the scattering of electrons in a solid, which is used in image formation in a scanning electron microscope.