Experimental Study of Metrological Characteristics of the Automated Interferometric System for Measuring the Surface Shape of Diffusely Reflecting Objects
- Авторлар: Maiorov E.1, Prokopenko V.2, Mashek A.3, Tsygankova G.3, Kurlov A.4, Khokhlova M.5, Kirik D.6, Kapralov D.6
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Мекемелер:
- St. Petersburg University of Management and Economics Technologies
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO)
- Naval Polytechnic Institute
- St. Petersburg State University of Aerospace Instrumentation
- Mozhaisky Military Space Academy
- Bonch-Bruevich St. Petersburg State University of Telecommunications
- Шығарылым: Том 60, № 10 (2018)
- Беттер: 1016-1021
- Бөлім: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/246308
- DOI: https://doi.org/10.1007/s11018-018-1310-z
- ID: 246308
Дәйексөз келтіру
Аннотация
The metrological characteristics of an automated interferometric system for measuring the surface shape of diffusely reflecting objects have been experimentally studied. Changes in the amplitude of the output signal during modulation of the optical path difference were studied and visualization of the effect of introduced interference on the measurement error was made. It is established that as the angle of incidence of optical radiation increases, the duration of the interference signal increases and, correspondingly, the measurement error of the automated interferometric system. The dependence of the measurement range on the scanning frequency of the reference mirror is obtained. The measurement error of an automated interferometric system under normal illumination does not exceed 0.67 μm.
Авторлар туралы
E. Maiorov
St. Petersburg University of Management and Economics Technologies
Хат алмасуға жауапты Автор.
Email: majorov_ee@mail.ru
Ресей, St. Petersburg
V. Prokopenko
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO)
Email: majorov_ee@mail.ru
Ресей, St. Petersburg
A. Mashek
Naval Polytechnic Institute
Email: majorov_ee@mail.ru
Ресей, Pushkin
G. Tsygankova
Naval Polytechnic Institute
Email: majorov_ee@mail.ru
Ресей, Pushkin
A. Kurlov
St. Petersburg State University of Aerospace Instrumentation
Email: majorov_ee@mail.ru
Ресей, St. Petersburg
M. Khokhlova
Mozhaisky Military Space Academy
Email: majorov_ee@mail.ru
Ресей, St. Petersburg
D. Kirik
Bonch-Bruevich St. Petersburg State University of Telecommunications
Email: majorov_ee@mail.ru
Ресей, St. Petersburg
D. Kapralov
Bonch-Bruevich St. Petersburg State University of Telecommunications
Email: majorov_ee@mail.ru
Ресей, St. Petersburg