Experimental Study of Metrological Characteristics of the Automated Interferometric System for Measuring the Surface Shape of Diffusely Reflecting Objects
- Authors: Maiorov E.E.1, Prokopenko V.T.2, Mashek A.C.3, Tsygankova G.A.3, Kurlov A.V.4, Khokhlova M.V.5, Kirik D.I.6, Kapralov D.D.6
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Affiliations:
- St. Petersburg University of Management and Economics Technologies
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO)
- Naval Polytechnic Institute
- St. Petersburg State University of Aerospace Instrumentation
- Mozhaisky Military Space Academy
- Bonch-Bruevich St. Petersburg State University of Telecommunications
- Issue: Vol 60, No 10 (2018)
- Pages: 1016-1021
- Section: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/246308
- DOI: https://doi.org/10.1007/s11018-018-1310-z
- ID: 246308
Cite item
Abstract
The metrological characteristics of an automated interferometric system for measuring the surface shape of diffusely reflecting objects have been experimentally studied. Changes in the amplitude of the output signal during modulation of the optical path difference were studied and visualization of the effect of introduced interference on the measurement error was made. It is established that as the angle of incidence of optical radiation increases, the duration of the interference signal increases and, correspondingly, the measurement error of the automated interferometric system. The dependence of the measurement range on the scanning frequency of the reference mirror is obtained. The measurement error of an automated interferometric system under normal illumination does not exceed 0.67 μm.
About the authors
E. E. Maiorov
St. Petersburg University of Management and Economics Technologies
Author for correspondence.
Email: majorov_ee@mail.ru
Russian Federation, St. Petersburg
V. T. Prokopenko
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO)
Email: majorov_ee@mail.ru
Russian Federation, St. Petersburg
A. Ch. Mashek
Naval Polytechnic Institute
Email: majorov_ee@mail.ru
Russian Federation, Pushkin
G. A. Tsygankova
Naval Polytechnic Institute
Email: majorov_ee@mail.ru
Russian Federation, Pushkin
A. V. Kurlov
St. Petersburg State University of Aerospace Instrumentation
Email: majorov_ee@mail.ru
Russian Federation, St. Petersburg
M. V. Khokhlova
Mozhaisky Military Space Academy
Email: majorov_ee@mail.ru
Russian Federation, St. Petersburg
D. I. Kirik
Bonch-Bruevich St. Petersburg State University of Telecommunications
Email: majorov_ee@mail.ru
Russian Federation, St. Petersburg
D. D. Kapralov
Bonch-Bruevich St. Petersburg State University of Telecommunications
Email: majorov_ee@mail.ru
Russian Federation, St. Petersburg