Experimental Study of Metrological Characteristics of the Automated Interferometric System for Measuring the Surface Shape of Diffusely Reflecting Objects
- Авторы: Maiorov E.1, Prokopenko V.2, Mashek A.3, Tsygankova G.3, Kurlov A.4, Khokhlova M.5, Kirik D.6, Kapralov D.6
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Учреждения:
- St. Petersburg University of Management and Economics Technologies
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO)
- Naval Polytechnic Institute
- St. Petersburg State University of Aerospace Instrumentation
- Mozhaisky Military Space Academy
- Bonch-Bruevich St. Petersburg State University of Telecommunications
- Выпуск: Том 60, № 10 (2018)
- Страницы: 1016-1021
- Раздел: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/246308
- DOI: https://doi.org/10.1007/s11018-018-1310-z
- ID: 246308
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Аннотация
The metrological characteristics of an automated interferometric system for measuring the surface shape of diffusely reflecting objects have been experimentally studied. Changes in the amplitude of the output signal during modulation of the optical path difference were studied and visualization of the effect of introduced interference on the measurement error was made. It is established that as the angle of incidence of optical radiation increases, the duration of the interference signal increases and, correspondingly, the measurement error of the automated interferometric system. The dependence of the measurement range on the scanning frequency of the reference mirror is obtained. The measurement error of an automated interferometric system under normal illumination does not exceed 0.67 μm.
Об авторах
E. Maiorov
St. Petersburg University of Management and Economics Technologies
Автор, ответственный за переписку.
Email: majorov_ee@mail.ru
Россия, St. Petersburg
V. Prokopenko
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO)
Email: majorov_ee@mail.ru
Россия, St. Petersburg
A. Mashek
Naval Polytechnic Institute
Email: majorov_ee@mail.ru
Россия, Pushkin
G. Tsygankova
Naval Polytechnic Institute
Email: majorov_ee@mail.ru
Россия, Pushkin
A. Kurlov
St. Petersburg State University of Aerospace Instrumentation
Email: majorov_ee@mail.ru
Россия, St. Petersburg
M. Khokhlova
Mozhaisky Military Space Academy
Email: majorov_ee@mail.ru
Россия, St. Petersburg
D. Kirik
Bonch-Bruevich St. Petersburg State University of Telecommunications
Email: majorov_ee@mail.ru
Россия, St. Petersburg
D. Kapralov
Bonch-Bruevich St. Petersburg State University of Telecommunications
Email: majorov_ee@mail.ru
Россия, St. Petersburg