Nanoporosity of Si (100) bars

N. N. Gerasimenko; D. I. Smirnov; S. N. Novikov; S. P. Timoshenkov; V. S. Minaev; E. P. Goryunova

doi:10.1134/S0036024416090211

Nanoporosity of Si (100) bars

Авторы: Gerasimenko N.¹^,2^,3, Smirnov D.¹^,2, Novikov S.¹, Timoshenkov S.¹, Minaev V.¹, Goryunova E.¹
Учреждения:
1. National Research University of Electronic Technology (MIET)
2. Lebedev Institute of Physics
3. National Research Tomsk State University
Выпуск: Том 90, № 9 (2016)
Страницы: 1869-1874
Раздел: Physical Chemistry of Nanoclusters and Nanomaterials
URL: https://journals.rcsi.science/0036-0244/article/view/168772
DOI: https://doi.org/10.1134/S0036024416090211
ID: 168772

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Аннотация

Si(100) samples cut from a typical bar (100 mm in diameter) prepared using industrial technology are studied. Measurements of the electron work function (EWF) show that the size effects in these samples (a reduction in thickness along with a sample’s area and the EWF) detected earlier were due to nanostructure porosity that was buried by the technological treatment of a bar’s surface. This hidden nanoporosity is assumed to be a manifestation of the secondary crystal structure.