Nanoporosity of Si (100) bars
- Авторлар: Gerasimenko N.1,2,3, Smirnov D.1,2, Novikov S.1, Timoshenkov S.1, Minaev V.1, Goryunova E.1
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Мекемелер:
- National Research University of Electronic Technology (MIET)
- Lebedev Institute of Physics
- National Research Tomsk State University
- Шығарылым: Том 90, № 9 (2016)
- Беттер: 1869-1874
- Бөлім: Physical Chemistry of Nanoclusters and Nanomaterials
- URL: https://journals.rcsi.science/0036-0244/article/view/168772
- DOI: https://doi.org/10.1134/S0036024416090211
- ID: 168772
Дәйексөз келтіру
Аннотация
Si(100) samples cut from a typical bar (100 mm in diameter) prepared using industrial technology are studied. Measurements of the electron work function (EWF) show that the size effects in these samples (a reduction in thickness along with a sample’s area and the EWF) detected earlier were due to nanostructure porosity that was buried by the technological treatment of a bar’s surface. This hidden nanoporosity is assumed to be a manifestation of the secondary crystal structure.
Негізгі сөздер
Авторлар туралы
N. Gerasimenko
National Research University of Electronic Technology (MIET); Lebedev Institute of Physics; National Research Tomsk State University
Email: aviary@mail.ru
Ресей, Moscow, 124498; Moscow, 119991; Tomsk, 634050
D. Smirnov
National Research University of Electronic Technology (MIET); Lebedev Institute of Physics
Email: aviary@mail.ru
Ресей, Moscow, 124498; Moscow, 119991
S. Novikov
National Research University of Electronic Technology (MIET)
Хат алмасуға жауапты Автор.
Email: aviary@mail.ru
Ресей, Moscow, 124498
S. Timoshenkov
National Research University of Electronic Technology (MIET)
Email: aviary@mail.ru
Ресей, Moscow, 124498
V. Minaev
National Research University of Electronic Technology (MIET)
Email: aviary@mail.ru
Ресей, Moscow, 124498
E. Goryunova
National Research University of Electronic Technology (MIET)
Email: aviary@mail.ru
Ресей, Moscow, 124498