Email this article Nanoporosity of Si (100) bars
- Authors: Gerasimenko N.N.1,2,3, Smirnov D.I.1,2, Novikov S.N.1, Timoshenkov S.P.1, Minaev V.S.1, Goryunova E.P.1
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Affiliations:
- National Research University of Electronic Technology (MIET)
- Lebedev Institute of Physics
- National Research Tomsk State University
- Issue: Vol 90, No 9 (2016)
- Pages: 1869-1874
- Section: Physical Chemistry of Nanoclusters and Nanomaterials
- URL: https://journals.rcsi.science/0036-0244/article/view/168772
- DOI: https://doi.org/10.1134/S0036024416090211
- ID: 168772
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Abstract
Si(100) samples cut from a typical bar (100 mm in diameter) prepared using industrial technology are studied. Measurements of the electron work function (EWF) show that the size effects in these samples (a reduction in thickness along with a sample’s area and the EWF) detected earlier were due to nanostructure porosity that was buried by the technological treatment of a bar’s surface. This hidden nanoporosity is assumed to be a manifestation of the secondary crystal structure.
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About the authors
N. N. Gerasimenko
National Research University of Electronic Technology (MIET); Lebedev Institute of Physics; National Research Tomsk State University
Email: aviary@mail.ru
Russian Federation, Moscow, 124498; Moscow, 119991; Tomsk, 634050
D. I. Smirnov
National Research University of Electronic Technology (MIET); Lebedev Institute of Physics
Email: aviary@mail.ru
Russian Federation, Moscow, 124498; Moscow, 119991
S. N. Novikov
National Research University of Electronic Technology (MIET)
Author for correspondence.
Email: aviary@mail.ru
Russian Federation, Moscow, 124498
S. P. Timoshenkov
National Research University of Electronic Technology (MIET)
Email: aviary@mail.ru
Russian Federation, Moscow, 124498
V. S. Minaev
National Research University of Electronic Technology (MIET)
Email: aviary@mail.ru
Russian Federation, Moscow, 124498
E. P. Goryunova
National Research University of Electronic Technology (MIET)
Email: aviary@mail.ru
Russian Federation, Moscow, 124498
