Nanoporosity of Si (100) bars


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详细

Si(100) samples cut from a typical bar (100 mm in diameter) prepared using industrial technology are studied. Measurements of the electron work function (EWF) show that the size effects in these samples (a reduction in thickness along with a sample’s area and the EWF) detected earlier were due to nanostructure porosity that was buried by the technological treatment of a bar’s surface. This hidden nanoporosity is assumed to be a manifestation of the secondary crystal structure.

作者简介

N. Gerasimenko

National Research University of Electronic Technology (MIET); Lebedev Institute of Physics; National Research Tomsk State University

Email: aviary@mail.ru
俄罗斯联邦, Moscow, 124498; Moscow, 119991; Tomsk, 634050

D. Smirnov

National Research University of Electronic Technology (MIET); Lebedev Institute of Physics

Email: aviary@mail.ru
俄罗斯联邦, Moscow, 124498; Moscow, 119991

S. Novikov

National Research University of Electronic Technology (MIET)

编辑信件的主要联系方式.
Email: aviary@mail.ru
俄罗斯联邦, Moscow, 124498

S. Timoshenkov

National Research University of Electronic Technology (MIET)

Email: aviary@mail.ru
俄罗斯联邦, Moscow, 124498

V. Minaev

National Research University of Electronic Technology (MIET)

Email: aviary@mail.ru
俄罗斯联邦, Moscow, 124498

E. Goryunova

National Research University of Electronic Technology (MIET)

Email: aviary@mail.ru
俄罗斯联邦, Moscow, 124498


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