Email this article An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring
- Authors: Tikhonravov A.V.1, Kochikov I.V.1, Trubetskov M.K.2, Sharapova S.A.1, Zhupanov V.G.3, Yagola A.G.4
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Affiliations:
- Research Computer Center
- Max Planck Institute of Quantum Optics
- Lutch Scientific Research Institution
- Department of Physics
- Issue: Vol 72, No 3 (2017)
- Pages: 274-278
- Section: Optics and Spectroscopy. Laser Physics
- URL: https://journals.rcsi.science/0027-1349/article/view/164768
- DOI: https://doi.org/10.3103/S0027134917030134
- ID: 164768
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Abstract
An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors.
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About the authors
A. V. Tikhonravov
Research Computer Center
Author for correspondence.
Email: tikh@srcc.msu.su
Russian Federation, Moscow, 119991
I. V. Kochikov
Research Computer Center
Email: tikh@srcc.msu.su
Russian Federation, Moscow, 119991
M. K. Trubetskov
Max Planck Institute of Quantum Optics
Email: tikh@srcc.msu.su
Germany, Garching, 85748
S. A. Sharapova
Research Computer Center
Email: tikh@srcc.msu.su
Russian Federation, Moscow, 119991
V. G. Zhupanov
Lutch Scientific Research Institution
Email: tikh@srcc.msu.su
Russian Federation, Podolsk, Moscow
A. G. Yagola
Department of Physics
Email: tikh@srcc.msu.su
Russian Federation, Moscow, 119991
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