Отправить статью по E-mail An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring
- Авторы: Tikhonravov A.V.1, Kochikov I.V.1, Trubetskov M.K.2, Sharapova S.A.1, Zhupanov V.G.3, Yagola A.G.4
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Учреждения:
- Research Computer Center
- Max Planck Institute of Quantum Optics
- Lutch Scientific Research Institution
- Department of Physics
- Выпуск: Том 72, № 3 (2017)
- Страницы: 274-278
- Раздел: Optics and Spectroscopy. Laser Physics
- URL: https://journals.rcsi.science/0027-1349/article/view/164768
- DOI: https://doi.org/10.3103/S0027134917030134
- ID: 164768
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Аннотация
An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors.
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A. Tikhonravov
Research Computer Center
Автор, ответственный за переписку.
Email: tikh@srcc.msu.su
Россия, Moscow, 119991
I. Kochikov
Research Computer Center
Email: tikh@srcc.msu.su
Россия, Moscow, 119991
M. Trubetskov
Max Planck Institute of Quantum Optics
Email: tikh@srcc.msu.su
Германия, Garching, 85748
S. Sharapova
Research Computer Center
Email: tikh@srcc.msu.su
Россия, Moscow, 119991
V. Zhupanov
Lutch Scientific Research Institution
Email: tikh@srcc.msu.su
Россия, Podolsk, Moscow
A. Yagola
Department of Physics
Email: tikh@srcc.msu.su
Россия, Moscow, 119991
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