An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring

A. V. Tikhonravov; I. V. Kochikov; M. K. Trubetskov; S. A. Sharapova; V. G. Zhupanov; A. G. Yagola

doi:10.3103/S0027134917030134

An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring

作者: Tikhonravov A.V.¹, Kochikov I.V.¹, Trubetskov M.K.², Sharapova S.A.¹, Zhupanov V.G.³, Yagola A.G.⁴
隶属关系:
1. Research Computer Center
2. Max Planck Institute of Quantum Optics
3. Lutch Scientific Research Institution
4. Department of Physics
期: 卷 72, 编号 3 (2017)
页面: 274-278
栏目: Optics and Spectroscopy. Laser Physics
URL: https://journals.rcsi.science/0027-1349/article/view/164768
DOI: https://doi.org/10.3103/S0027134917030134
ID: 164768

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详细

An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors.