Email this article Structural Engineering of Vacuum-ARC Multiperiod Coatings
- Authors: Sobol’ O.V.1, Andreev A.A.2, Gorban’ V.F.3
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Affiliations:
- Kharkov Polytechnic Institute
- Kharkov Physicotechnical Institute
- I. M. Frantsevich Institute for Problems of Materials Science of the National Academy of Sciences of Ukraine
- Issue: Vol 58, No 1-2 (2016)
- Pages: 37-39
- Section: Article
- URL: https://journals.rcsi.science/0026-0673/article/view/235338
- DOI: https://doi.org/10.1007/s11041-016-9961-3
- ID: 235338
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Abstract
The possibilities of structural engineering in multiperiod TiN/Ti, TiN/CrN, TiN/MoN and TiN/ZrN systems are presented. Three principal parameters determining the structural state and properties of the coatings are determined, i.e., the substrate potential during the deposition, the thickness of layers in a period, and the pressure of the working atmosphere. The results of the study are used to develop deposition modes providing high mechanical properties in the coatings.
About the authors
O. V. Sobol’
Kharkov Polytechnic Institute
Author for correspondence.
Email: sool@kpi.kharkov.ua
Ukraine, Kharkov
A. A. Andreev
Kharkov Physicotechnical Institute
Email: sool@kpi.kharkov.ua
Ukraine, Kharkov
V. F. Gorban’
I. M. Frantsevich Institute for Problems of Materials Science of the National Academy of Sciences of Ukraine
Email: sool@kpi.kharkov.ua
Ukraine, Kiev
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