Structural Engineering of Vacuum-ARC Multiperiod Coatings
- 作者: Sobol’ O.V.1, Andreev A.A.2, Gorban’ V.F.3
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隶属关系:
- Kharkov Polytechnic Institute
- Kharkov Physicotechnical Institute
- I. M. Frantsevich Institute for Problems of Materials Science of the National Academy of Sciences of Ukraine
- 期: 卷 58, 编号 1-2 (2016)
- 页面: 37-39
- 栏目: Article
- URL: https://journals.rcsi.science/0026-0673/article/view/235338
- DOI: https://doi.org/10.1007/s11041-016-9961-3
- ID: 235338
如何引用文章
详细
The possibilities of structural engineering in multiperiod TiN/Ti, TiN/CrN, TiN/MoN and TiN/ZrN systems are presented. Three principal parameters determining the structural state and properties of the coatings are determined, i.e., the substrate potential during the deposition, the thickness of layers in a period, and the pressure of the working atmosphere. The results of the study are used to develop deposition modes providing high mechanical properties in the coatings.
作者简介
O. Sobol’
Kharkov Polytechnic Institute
编辑信件的主要联系方式.
Email: sool@kpi.kharkov.ua
乌克兰, Kharkov
A. Andreev
Kharkov Physicotechnical Institute
Email: sool@kpi.kharkov.ua
乌克兰, Kharkov
V. Gorban’
I. M. Frantsevich Institute for Problems of Materials Science of the National Academy of Sciences of Ukraine
Email: sool@kpi.kharkov.ua
乌克兰, Kiev
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