Structural Engineering of Vacuum-ARC Multiperiod Coatings
- Авторы: Sobol’ O.V.1, Andreev A.A.2, Gorban’ V.F.3
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Учреждения:
- Kharkov Polytechnic Institute
- Kharkov Physicotechnical Institute
- I. M. Frantsevich Institute for Problems of Materials Science of the National Academy of Sciences of Ukraine
- Выпуск: Том 58, № 1-2 (2016)
- Страницы: 37-39
- Раздел: Article
- URL: https://journals.rcsi.science/0026-0673/article/view/235338
- DOI: https://doi.org/10.1007/s11041-016-9961-3
- ID: 235338
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Аннотация
The possibilities of structural engineering in multiperiod TiN/Ti, TiN/CrN, TiN/MoN and TiN/ZrN systems are presented. Three principal parameters determining the structural state and properties of the coatings are determined, i.e., the substrate potential during the deposition, the thickness of layers in a period, and the pressure of the working atmosphere. The results of the study are used to develop deposition modes providing high mechanical properties in the coatings.
Об авторах
O. Sobol’
Kharkov Polytechnic Institute
Автор, ответственный за переписку.
Email: sool@kpi.kharkov.ua
Украина, Kharkov
A. Andreev
Kharkov Physicotechnical Institute
Email: sool@kpi.kharkov.ua
Украина, Kharkov
V. Gorban’
I. M. Frantsevich Institute for Problems of Materials Science of the National Academy of Sciences of Ukraine
Email: sool@kpi.kharkov.ua
Украина, Kiev
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