Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma
- 作者: Mochalov L.1, Kudryashov M.1, Prokhorov I.1, Vshivtsev M.1, Kudryashova Y.1, Slapovskaya E.1, Knyazev A.1
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隶属关系:
- Lobachevsky State University of Nizhny Novgorod (National Research University)
- 期: 卷 57, 编号 6 (2023)
- 页面: 478-484
- 栏目: ПЛАЗМОХИМИЯ
- URL: https://journals.rcsi.science/0023-1193/article/view/232808
- DOI: https://doi.org/10.31857/S0023119323060116
- EDN: https://elibrary.ru/RVETZB
- ID: 232808
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详细
A process for fabricating Zn-doped (up to 10 at %) β-Ga2O3 thin films by plasma-enhanced chemical vapor deposition has been studied. High-purity gallium, zinc, and oxygen were used as starting materials, and hydrogen was chosen as the carrier and plasma gas. A low-temperature nonequilibrium RF (40.68 MHz) discharge plasma at a reduced pressure (0.01 torr) was used to initiate chemical reactions of precursors. The
plasma-chemical process was monitored using optical emission spectroscopy. Structural properties and morphology of the deposited β-Ga2O3 films were studied by various methods.
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作者简介
L. Mochalov
Lobachevsky State University of Nizhny Novgorod (National Research University)
Email: igorprokhorov1998@yandex.ru
Nizhny Novgorod, 603950 Russia
M. Kudryashov
Lobachevsky State University of Nizhny Novgorod (National Research University)
Email: igorprokhorov1998@yandex.ru
Nizhny Novgorod, 603950 Russia
I. Prokhorov
Lobachevsky State University of Nizhny Novgorod (National Research University)
Email: igorprokhorov1998@yandex.ru
Nizhny Novgorod, 603950 Russia
M. Vshivtsev
Lobachevsky State University of Nizhny Novgorod (National Research University)
Email: igorprokhorov1998@yandex.ru
Nizhny Novgorod, 603950 Russia
Yu. Kudryashova
Lobachevsky State University of Nizhny Novgorod (National Research University)
Email: igorprokhorov1998@yandex.ru
Nizhny Novgorod, 603950 Russia
E. Slapovskaya
Lobachevsky State University of Nizhny Novgorod (National Research University)
Email: igorprokhorov1998@yandex.ru
Nizhny Novgorod, 603950 Russia
A. Knyazev
Lobachevsky State University of Nizhny Novgorod (National Research University)
编辑信件的主要联系方式.
Email: igorprokhorov1998@yandex.ru
Nizhny Novgorod, 603950 Russia
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