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Plasma-Enhanced Chemical Vapor Deposition of Thin GaS Films on Various Types of Substrates
Kudryashov M.A., Mochalov L.A., Prokhorov I.O., Vshivtsev M.A., Kudryashova Y.P., Malyshev V.M., Slapovskaya E.A.
Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma
Mochalov L.A., Kudryashov M.A., Prokhorov I.O., Vshivtsev M.A., Kudryashova Y.P., Slapovskaya E.A., Knyazev A.V.
A Study on the Process of Plasma-Enhanced Chemical Vapor Deposition of (AlxGa1 – x)2O3 Thin Films
Mochalov L.A., Kudryashov M.A., Prokhorov I.O., Vshivtsev M.A., Kudryashova Y.P., Knyazev A.V.
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