A model for calculating the composition of GaAs  x  P 1– x   solid solutions under metalorganic vapor phase epitaxy conditions

A. D. Maksimov; V. Yu. Eistrikh-Geller; A. A. Marmalyuk; M. A. Ladugin; T. A. Bagaev; P. V. Gorlachuk; I. V. Yarotskaya

doi:10.1134/S0020168517040124

A model for calculating the composition of GaAs_xP_1–x solid solutions under metalorganic vapor phase epitaxy conditions

Авторлар: Maksimov A.D.¹, Eistrikh-Geller V.Y.¹, Marmalyuk A.A.², Ladugin M.A.², Bagaev T.A.², Gorlachuk P.V.², Yarotskaya I.V.²
Мекемелер:
1. Institute of Fine Chemical Technologies
2. AO Stel’makh Polyus Research Institute
Шығарылым: Том 53, № 4 (2017)
Беттер: 369-375
Бөлім: Article
URL: https://journals.rcsi.science/0020-1685/article/view/158198
DOI: https://doi.org/10.1134/S0020168517040124
ID: 158198

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Аннотация

A model is proposed for calculating the composition of GaAs_xP_1–x solid solutions, based on the iterative determination of the equilibrium partial pressures of the pyrolysis products of the starting reagents, followed by calculation of the composition of the solid solution in an adsorption–desorption model. The proposed model ensures good agreement between calculation results and experimental data.