A model for calculating the composition of GaAsxP1–x solid solutions under metalorganic vapor phase epitaxy conditions
- Авторлар: Maksimov A.D.1, Eistrikh-Geller V.Y.1, Marmalyuk A.A.2, Ladugin M.A.2, Bagaev T.A.2, Gorlachuk P.V.2, Yarotskaya I.V.2
-
Мекемелер:
- Institute of Fine Chemical Technologies
- AO Stel’makh Polyus Research Institute
- Шығарылым: Том 53, № 4 (2017)
- Беттер: 369-375
- Бөлім: Article
- URL: https://journals.rcsi.science/0020-1685/article/view/158198
- DOI: https://doi.org/10.1134/S0020168517040124
- ID: 158198
Дәйексөз келтіру
Аннотация
A model is proposed for calculating the composition of GaAsxP1–x solid solutions, based on the iterative determination of the equilibrium partial pressures of the pyrolysis products of the starting reagents, followed by calculation of the composition of the solid solution in an adsorption–desorption model. The proposed model ensures good agreement between calculation results and experimental data.
Авторлар туралы
A. Maksimov
Institute of Fine Chemical Technologies
Хат алмасуға жауапты Автор.
Email: admaximov@mitht.ru
Ресей, pr. Vernadskogo 86, Moscow, 119571
V. Eistrikh-Geller
Institute of Fine Chemical Technologies
Email: admaximov@mitht.ru
Ресей, pr. Vernadskogo 86, Moscow, 119571
A. Marmalyuk
AO Stel’makh Polyus Research Institute
Email: admaximov@mitht.ru
Ресей, ul. Vvedenskogo 3/1, Moscow, 117342
M. Ladugin
AO Stel’makh Polyus Research Institute
Email: admaximov@mitht.ru
Ресей, ul. Vvedenskogo 3/1, Moscow, 117342
T. Bagaev
AO Stel’makh Polyus Research Institute
Email: admaximov@mitht.ru
Ресей, ul. Vvedenskogo 3/1, Moscow, 117342
P. Gorlachuk
AO Stel’makh Polyus Research Institute
Email: admaximov@mitht.ru
Ресей, ul. Vvedenskogo 3/1, Moscow, 117342
I. Yarotskaya
AO Stel’makh Polyus Research Institute
Email: admaximov@mitht.ru
Ресей, ul. Vvedenskogo 3/1, Moscow, 117342
Қосымша файлдар
