A model for calculating the composition of GaAs  x  P 1– x   solid solutions under metalorganic vapor phase epitaxy conditions

A. D. Maksimov; V. Yu. Eistrikh-Geller; A. A. Marmalyuk; M. A. Ladugin; T. A. Bagaev; P. V. Gorlachuk; I. V. Yarotskaya

doi:10.1134/S0020168517040124

A model for calculating the composition of GaAs_xP_1–x solid solutions under metalorganic vapor phase epitaxy conditions

Autores: Maksimov A.D.¹, Eistrikh-Geller V.Y.¹, Marmalyuk A.A.², Ladugin M.A.², Bagaev T.A.², Gorlachuk P.V.², Yarotskaya I.V.²
Afiliações:
1. Institute of Fine Chemical Technologies
2. AO Stel’makh Polyus Research Institute
Edição: Volume 53, Nº 4 (2017)
Páginas: 369-375
Seção: Article
URL: https://journals.rcsi.science/0020-1685/article/view/158198
DOI: https://doi.org/10.1134/S0020168517040124
ID: 158198

Citar

Texto integral

Acesso aberto
Acesso é fechado

Acesso está concedido
Acesso é fechado

Somente assinantes

Resumo
Sobre autores
Bibliografia
Arquivos suplementares
Estatísticas

Resumo

A model is proposed for calculating the composition of GaAs_xP_1–x solid solutions, based on the iterative determination of the equilibrium partial pressures of the pyrolysis products of the starting reagents, followed by calculation of the composition of the solid solution in an adsorption–desorption model. The proposed model ensures good agreement between calculation results and experimental data.