Morphology of pores produced in n-Si {100} by etching in hydrofluoric acid solutions


Cite item

Full Text

Open Access Open Access
Restricted Access Access granted
Restricted Access Subscription Access

Abstract

Variations in the contours of pores produced in n-type silicon by electrochemical etching in hydrofluoric acid solutions are interpreted in terms of the mechanism underlying the chemical interaction of the etchant with silicon and the anisotropy of the etchant–silicon system. Mathematical expressions are proposed which describe the contours and limiting radial sizes of pores forming at the very beginning of the etching process (~10–15 s).

About the authors

E. N. Abramova

Institute of Fine Chemical Technologies

Author for correspondence.
Email: anavenko@yandex.ru
Russian Federation, pr. Vernadskogo 86, Moscow, 119571

A. M. Khort

Institute of Fine Chemical Technologies

Email: anavenko@yandex.ru
Russian Federation, pr. Vernadskogo 86, Moscow, 119571

Yu. V. Syrov

Institute of Fine Chemical Technologies

Email: anavenko@yandex.ru
Russian Federation, pr. Vernadskogo 86, Moscow, 119571

A. G. Yakovenko

Institute of Fine Chemical Technologies

Email: anavenko@yandex.ru
Russian Federation, pr. Vernadskogo 86, Moscow, 119571

V. I. Shvets

Institute of Fine Chemical Technologies

Email: anavenko@yandex.ru
Russian Federation, pr. Vernadskogo 86, Moscow, 119571

Supplementary files

Supplementary Files
Action
1. JATS XML

Copyright (c) 2016 Pleiades Publishing, Ltd.