电邮这篇文章 Laser Technologies in Micro-Optics. Part 2. Fabrication of Elements with a Three-Dimensional Profile
- 作者: Poleshchuk A.G.1, Korolkov V.P.1, Veiko V.P.1,2, Zakoldaev R.A.1, Sergeev M.M.2
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隶属关系:
- Institute of Automation and Electrometry, Siberian Branch
- ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
- 期: 卷 54, 编号 2 (2018)
- 页面: 113-126
- 栏目: Optical Information Technologies
- URL: https://journals.rcsi.science/8756-6990/article/view/212382
- DOI: https://doi.org/10.3103/S8756699018020012
- ID: 212382
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详细
Recent research in the field of formation of a 3D profile of optical elements with the use of direct laser writing at various wavelengths and photolithographic technologies on the basis of photomasks fabricated by means of laser writing is reviewed. Typical characteristics of the relief, as well as advantages and drawbacks of the above-mentioned methods are considered.
作者简介
A. Poleshchuk
Institute of Automation and Electrometry, Siberian Branch
Email: victork@iae.nsk.su
俄罗斯联邦, pr. Akademika Koptyuga 1, Novosibirsk, 630090
V. Korolkov
Institute of Automation and Electrometry, Siberian Branch
编辑信件的主要联系方式.
Email: victork@iae.nsk.su
俄罗斯联邦, pr. Akademika Koptyuga 1, Novosibirsk, 630090
V. Veiko
Institute of Automation and Electrometry, Siberian Branch; ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
Email: victork@iae.nsk.su
俄罗斯联邦, pr. Akademika Koptyuga 1, Novosibirsk, 630090; Kronverkskii pr. 49, Saint. Petersburg, 197101
R. Zakoldaev
Institute of Automation and Electrometry, Siberian Branch
Email: victork@iae.nsk.su
俄罗斯联邦, pr. Akademika Koptyuga 1, Novosibirsk, 630090
M. Sergeev
ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
Email: victork@iae.nsk.su
俄罗斯联邦, Kronverkskii pr. 49, Saint. Petersburg, 197101
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