Email this article Laser Technologies in Micro-Optics. Part 2. Fabrication of Elements with a Three-Dimensional Profile
- Authors: Poleshchuk A.G.1, Korolkov V.P.1, Veiko V.P.1,2, Zakoldaev R.A.1, Sergeev M.M.2
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Affiliations:
- Institute of Automation and Electrometry, Siberian Branch
- ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
- Issue: Vol 54, No 2 (2018)
- Pages: 113-126
- Section: Optical Information Technologies
- URL: https://journals.rcsi.science/8756-6990/article/view/212382
- DOI: https://doi.org/10.3103/S8756699018020012
- ID: 212382
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Abstract
Recent research in the field of formation of a 3D profile of optical elements with the use of direct laser writing at various wavelengths and photolithographic technologies on the basis of photomasks fabricated by means of laser writing is reviewed. Typical characteristics of the relief, as well as advantages and drawbacks of the above-mentioned methods are considered.
About the authors
A. G. Poleshchuk
Institute of Automation and Electrometry, Siberian Branch
Email: victork@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090
V. P. Korolkov
Institute of Automation and Electrometry, Siberian Branch
Author for correspondence.
Email: victork@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090
V. P. Veiko
Institute of Automation and Electrometry, Siberian Branch; ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
Email: victork@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090; Kronverkskii pr. 49, Saint. Petersburg, 197101
R. A. Zakoldaev
Institute of Automation and Electrometry, Siberian Branch
Email: victork@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090
M. M. Sergeev
ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
Email: victork@iae.nsk.su
Russian Federation, Kronverkskii pr. 49, Saint. Petersburg, 197101
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