Enviar artigo por via de e-mail Laser Technologies in Micro-Optics. Part 2. Fabrication of Elements with a Three-Dimensional Profile
- Autores: Poleshchuk A.G.1, Korolkov V.P.1, Veiko V.P.1,2, Zakoldaev R.A.1, Sergeev M.M.2
-
Afiliações:
- Institute of Automation and Electrometry, Siberian Branch
- ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
- Edição: Volume 54, Nº 2 (2018)
- Páginas: 113-126
- Seção: Optical Information Technologies
- URL: https://journals.rcsi.science/8756-6990/article/view/212382
- DOI: https://doi.org/10.3103/S8756699018020012
- ID: 212382
Citar
Acesso aberto
Acesso está concedido
Somente assinantes
Resumo
Recent research in the field of formation of a 3D profile of optical elements with the use of direct laser writing at various wavelengths and photolithographic technologies on the basis of photomasks fabricated by means of laser writing is reviewed. Typical characteristics of the relief, as well as advantages and drawbacks of the above-mentioned methods are considered.
Palavras-chave
Sobre autores
A. Poleshchuk
Institute of Automation and Electrometry, Siberian Branch
Email: victork@iae.nsk.su
Rússia, pr. Akademika Koptyuga 1, Novosibirsk, 630090
V. Korolkov
Institute of Automation and Electrometry, Siberian Branch
Autor responsável pela correspondência
Email: victork@iae.nsk.su
Rússia, pr. Akademika Koptyuga 1, Novosibirsk, 630090
V. Veiko
Institute of Automation and Electrometry, Siberian Branch; ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
Email: victork@iae.nsk.su
Rússia, pr. Akademika Koptyuga 1, Novosibirsk, 630090; Kronverkskii pr. 49, Saint. Petersburg, 197101
R. Zakoldaev
Institute of Automation and Electrometry, Siberian Branch
Email: victork@iae.nsk.su
Rússia, pr. Akademika Koptyuga 1, Novosibirsk, 630090
M. Sergeev
ITMO University (National Research Institute of Information Technologies, Mechanics, and Optics)
Email: victork@iae.nsk.su
Rússia, Kronverkskii pr. 49, Saint. Petersburg, 197101
Arquivos suplementares
