Formation of Thick High-Aspect-Ratio Resistive Masks by the Contact Photolithography Method
- Autores: Gentselev A.N.1, Dul’tsev F.N.2,3, Kondrat’ev V.I.1, Lemzyakov A.G.1
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Afiliações:
- Budker Institute of Nuclear Physics, Siberian Branch
- Rzhanov Institute of Semiconductor Physics, Siberian Branch
- Novosibirsk State University
- Edição: Volume 54, Nº 2 (2018)
- Páginas: 127-134
- Seção: Optical Information Technologies
- URL: https://journals.rcsi.science/8756-6990/article/view/212384
- DOI: https://doi.org/10.3103/S8756699018020024
- ID: 212384
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Resumo
A method of fabrication of thick (~100 μm and more) resistive masks is described. These masks can be used for solving various engineering problems, e.g., for fabricating x-ray-absorbing topological patterns for LIGA masks, stamp microrelief, cast moulds, etc. Specific features of the contact photolithography method, which is used to design and fabricate the research device, are described. A source of exposure radiation in this device is a light-emitting diode. A possibility of obtaining individual elements of the resistive mask (in particular, with the lateral size ~5 μm, height of ~70 μm, and aspect ratio of ~14) and also the titanium stamp microrelief (with the height up to ~40 μm) generated by means of reactive ion-beam etching through the resistive mask, is experimentally demonstrated.
Sobre autores
A. Gentselev
Budker Institute of Nuclear Physics, Siberian Branch
Autor responsável pela correspondência
Email: A.N.Gentselev@inp.nsk.su
Rússia, pr. Akademika Lavrent’eva 11, Novosibirsk, 630090
F. Dul’tsev
Rzhanov Institute of Semiconductor Physics, Siberian Branch; Novosibirsk State University
Email: A.N.Gentselev@inp.nsk.su
Rússia, pr. Akademika Lavrent’eva 13, Novosibirsk, 630090; ul. Pirogova 2, Novosibirsk, 630090
V. Kondrat’ev
Budker Institute of Nuclear Physics, Siberian Branch
Email: A.N.Gentselev@inp.nsk.su
Rússia, pr. Akademika Lavrent’eva 11, Novosibirsk, 630090
A. Lemzyakov
Budker Institute of Nuclear Physics, Siberian Branch
Email: A.N.Gentselev@inp.nsk.su
Rússia, pr. Akademika Lavrent’eva 11, Novosibirsk, 630090
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