Email this article Capacitive MEMS accelerometers for measuring high-g accelerations
- Authors: Baginsky I.L.1, Kostsov E.G.1
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Affiliations:
- Institute of Automation and Electrometry, Siberian Branch
- Issue: Vol 53, No 3 (2017)
- Pages: 294-302
- Section: Physical and Engineering Fundamentals of Microelectronics and Optoelectronics
- URL: https://journals.rcsi.science/8756-6990/article/view/212161
- DOI: https://doi.org/10.3103/S8756699017030141
- ID: 212161
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Abstract
A possibility of creating a capacitive accelerometer for measuring high-g accelerations (up to 106g and higher) is discussed. It is demonstrated that insertion of a thin electret film with a high surface potential into the gap between the electrodes ensures significant expansion of the frequency and amplitude ranges of acceleration measurements, whereas the size of the proposed device is smaller than that of available MEMS accelerometers for measuring high-g accelerations. A mathematical model of an electret accelerometer for high-g accelerations is developed, and the main specific features of accelerometer operation are analyzed.
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About the authors
I. L. Baginsky
Institute of Automation and Electrometry, Siberian Branch
Email: kostsov@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090
E. G. Kostsov
Institute of Automation and Electrometry, Siberian Branch
Author for correspondence.
Email: kostsov@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090
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