Отправить статью по E-mail Capacitive MEMS accelerometers for measuring high-g accelerations
- Авторы: Baginsky I.L.1, Kostsov E.G.1
-
Учреждения:
- Institute of Automation and Electrometry, Siberian Branch
- Выпуск: Том 53, № 3 (2017)
- Страницы: 294-302
- Раздел: Physical and Engineering Fundamentals of Microelectronics and Optoelectronics
- URL: https://journals.rcsi.science/8756-6990/article/view/212161
- DOI: https://doi.org/10.3103/S8756699017030141
- ID: 212161
Цитировать
Открытый доступ
Доступ предоставлен
Только для подписчиков
Аннотация
A possibility of creating a capacitive accelerometer for measuring high-g accelerations (up to 106g and higher) is discussed. It is demonstrated that insertion of a thin electret film with a high surface potential into the gap between the electrodes ensures significant expansion of the frequency and amplitude ranges of acceleration measurements, whereas the size of the proposed device is smaller than that of available MEMS accelerometers for measuring high-g accelerations. A mathematical model of an electret accelerometer for high-g accelerations is developed, and the main specific features of accelerometer operation are analyzed.
Ключевые слова
Об авторах
I. Baginsky
Institute of Automation and Electrometry, Siberian Branch
Email: kostsov@iae.nsk.su
Россия, pr. Akademika Koptyuga 1, Novosibirsk, 630090
E. Kostsov
Institute of Automation and Electrometry, Siberian Branch
Автор, ответственный за переписку.
Email: kostsov@iae.nsk.su
Россия, pr. Akademika Koptyuga 1, Novosibirsk, 630090
Дополнительные файлы
