EFFECTIVE METHODS OF SYNTHESIS AND OPTIMIZATION OF A HOLOGRAPHIC MASK
- Autores: Chernik V.1
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Afiliações:
- Ishlinsky Institute for Problems in Mechanics of the Russian Academy of Sciences
- Edição: Volume 512, Nº 1 (2023)
- Páginas: 44-50
- Seção: ФИЗИКА
- URL: https://journals.rcsi.science/2686-7400/article/view/232973
- DOI: https://doi.org/10.31857/S2686740023050036
- EDN: https://elibrary.ru/OWHLPJ
- ID: 232973
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Resumo
The paper presents several statements of the problems of synthesis of holographic mask in the form of optimization problems for quality of holographic images. An effective algorithm for the synthesis of holographic masks based on FFT with complexity O(NlnN), where N is the number of elements of the depicted object, is described. Based on this algorithm, a scalable software package has been developed and implemented that allows synthesizing holographic masks for various lithography applications, including the production of MEMS, MOEMS and high-end chips. Experimental results are presented.
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Sobre autores
V. Chernik
Ishlinsky Institute for Problems in Mechanics of the Russian Academy of Sciences
Autor responsável pela correspondência
Email: gungho424@gmail.com
Russia, Moscow
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