Thermal oxidation of GaAs under action of V2O5–MnO2 oxide chemostimulating formulations with particles size of 50–150 μm

Аннотация

Thermal oxidation of GaAs under action of V2O5–MnO2 formulations of the different composition with particles size of 50–150 μm has been studied. The revealed nonlinear effect of the combined action of the chemostimulators results from their interference accelerating their transformations, changing their evaporation, and affecting their incorporation into the oxide film growing at the GaAs surface.