Thermal oxidation of GaAs under action of V2O5–MnO2 oxide chemostimulating formulations with particles size of 50–150 μm
- Авторлар: Mittova I.1, Tretyakov N.1, Kostryukov V.1, Sladkopevtsev B.1
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Мекемелер:
- Voronezh State University
- Шығарылым: Том 86, № 5 (2016)
- Беттер: 995-1000
- Бөлім: Article
- URL: https://journals.rcsi.science/1070-3632/article/view/214893
- DOI: https://doi.org/10.1134/S1070363216050017
- ID: 214893
Дәйексөз келтіру
Аннотация
Thermal oxidation of GaAs under action of V2O5–MnO2 formulations of the different composition with particles size of 50–150 μm has been studied. The revealed nonlinear effect of the combined action of the chemostimulators results from their interference accelerating their transformations, changing their evaporation, and affecting their incorporation into the oxide film growing at the GaAs surface.
Негізгі сөздер
Авторлар туралы
I. Mittova
Voronezh State University
Хат алмасуға жауапты Автор.
Email: inorg@chem.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
N. Tretyakov
Voronezh State University
Email: inorg@chem.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
V. Kostryukov
Voronezh State University
Email: inorg@chem.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
B. Sladkopevtsev
Voronezh State University
Email: inorg@chem.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
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