Determination of Stiffness of the Guideways of Linear Electric Drive

Abstract

The advantages of roller guideways of linear electric drive of precision mechanisms of inspection and measuring machines of modern semiconductor production are considered. The frequency characteristics of a linear electric drive under different preloads of the guideways are considered. It is revealed that the guideways of the linear electric drive are the source of resonance, which reveals itself in the drop of the amplitude of logarithmic amplitude–frequency characteristic of the motor. The value of frequency of this resonance can be used for calculation of the stiffness of guideways along the moving direction. Changing the preload of guideways can lead to significant reduction of the amplitude margin of the velocity loop, which reveals itself in the appearance of vibrations of linear electric drive at the resonance frequency. Methods for suppression of such vibrations are proposed.