An express method of measurements of parameters of technological electron beams

Abstract

An express method of direct measurements of the current density distribution of axially symmetric electron beams is proposed. It is shown that use of the technique is urgently needed to improve the reproducibility of the results of electron-beam processing. Comparative analysis of existing methods to measure the parameters of electron beams used for technological purposes is carried out. A technique to restore a radial distribution of electron beam current density as well as a device to implement the technique is developed. The results of radial distribution recovery are analyzed in the case in which the initial distribution is given in the form of a model function of normal distribution. An algorithm to determine estimated sizes of the area within which spatial distribution discretization is carried out is developed. Based on analysis of the experimental dependences, it is shown that the suggested numerical method can be applied to all types of axial-symmetric distributions. The nature of errors occurring after distribution function recovery is analyzed. A technological projection of express diagnostic systems for the processing electron beams is made taking into account parameters of the existing element base.