Influence of Parameters of Reactive Magnetron Sputtering on Tribomechanical Properties of Protective Nanostructured Ti–Al–N Coatings

Аннотация

The influence of substrate temperature and bias voltage on the structure and tribomechanical properties of the Ti–Al–N coatings obtained by reactive magnetron sputtering technique has been investigated. The structure and elemental and phase compositions have been studied by scanning electron microscopy, Rutherford backscattering, and X-Ray diffraction. The results of friction and wear experiments indicated that the lowest coefficient of friction (three times lower than 12Cr18Ni10Ti) corresponded to a coating deposited at a bias voltage of–200 V and a substrate temperature of 340°С, while the most wear-resistant coating (under a load of 700 mN and the testing time of 1080 s) was Ti–Al–N sputtered at a bias voltage of–200 V and a substrate temperature of 440°С.