Growth of nano-crystalline diamond on single-crystalline diamond by CVD method


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Resumo

Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate.

Sobre autores

E. Ashkinazi

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”

Email: roma@sci.lebedev.ru
Rússia, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409

V. Sedov

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”

Email: roma@sci.lebedev.ru
Rússia, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409

R. Khmelnitsky

Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics; Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)

Autor responsável pela correspondência
Email: roma@sci.lebedev.ru
Rússia, Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190; ul. Pushkovykh 12, Troitsk, Moscow oblast, 142190

A. Khomich

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”

Email: roma@sci.lebedev.ru
Rússia, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409

A. Khomich

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics

Email: roma@sci.lebedev.ru
Rússia, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190

V. Ralchenko

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Harbin Institute of Technology

Email: roma@sci.lebedev.ru
Rússia, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Nan Gang District, West Dazhi Street, 92, Shenzhen, Harbin, 518055

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