Growth of nano-crystalline diamond on single-crystalline diamond by CVD method


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Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate.

作者简介

E. Ashkinazi

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”

Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409

V. Sedov

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”

Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409

R. Khmelnitsky

Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics; Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)

编辑信件的主要联系方式.
Email: roma@sci.lebedev.ru
俄罗斯联邦, Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190; ul. Pushkovykh 12, Troitsk, Moscow oblast, 142190

A. Khomich

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”

Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409

A. Khomich

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics

Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190

V. Ralchenko

Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Harbin Institute of Technology

Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Nan Gang District, West Dazhi Street, 92, Shenzhen, Harbin, 518055

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