Growth of nano-crystalline diamond on single-crystalline diamond by CVD method
- 作者: Ashkinazi E.E.1,2, Sedov V.S.1,2, Khmelnitsky R.A.3,4,5, Khomich A.A.1,2, Khomich A.V.1,2,3,4, Ralchenko V.G.1,2,6
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隶属关系:
- Prokhorov General Physics Institute
- National Research Nuclear University “MEPhI”
- Lebedev Physical Institute
- Kotel’nikov Institute of Radio Engineering and Electronics
- Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)
- Harbin Institute of Technology
- 期: 卷 43, 编号 12 (2016)
- 页面: 378-381
- 栏目: Article
- URL: https://journals.rcsi.science/1068-3356/article/view/228184
- DOI: https://doi.org/10.3103/S1068335616120101
- ID: 228184
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详细
Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate.
作者简介
E. Ashkinazi
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
V. Sedov
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
R. Khmelnitsky
Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics; Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)
编辑信件的主要联系方式.
Email: roma@sci.lebedev.ru
俄罗斯联邦, Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190; ul. Pushkovykh 12, Troitsk, Moscow oblast, 142190
A. Khomich
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
A. Khomich
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics
Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190
V. Ralchenko
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Harbin Institute of Technology
Email: roma@sci.lebedev.ru
俄罗斯联邦, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Nan Gang District, West Dazhi Street, 92, Shenzhen, Harbin, 518055
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