Email this article Growth of nano-crystalline diamond on single-crystalline diamond by CVD method
- Authors: Ashkinazi E.E.1,2, Sedov V.S.1,2, Khmelnitsky R.A.3,4,5, Khomich A.A.1,2, Khomich A.V.1,2,3,4, Ralchenko V.G.1,2,6
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Affiliations:
- Prokhorov General Physics Institute
- National Research Nuclear University “MEPhI”
- Lebedev Physical Institute
- Kotel’nikov Institute of Radio Engineering and Electronics
- Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)
- Harbin Institute of Technology
- Issue: Vol 43, No 12 (2016)
- Pages: 378-381
- Section: Article
- URL: https://journals.rcsi.science/1068-3356/article/view/228184
- DOI: https://doi.org/10.3103/S1068335616120101
- ID: 228184
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Abstract
Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate.
About the authors
E. E. Ashkinazi
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
Russian Federation, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
V. S. Sedov
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
Russian Federation, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
R. A. Khmelnitsky
Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics; Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)
Author for correspondence.
Email: roma@sci.lebedev.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190; ul. Pushkovykh 12, Troitsk, Moscow oblast, 142190
A. A. Khomich
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
Russian Federation, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
A. V. Khomich
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics
Email: roma@sci.lebedev.ru
Russian Federation, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190
V. G. Ralchenko
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Harbin Institute of Technology
Email: roma@sci.lebedev.ru
Russian Federation, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Nan Gang District, West Dazhi Street, 92, Shenzhen, Harbin, 518055
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