Отправить статью по E-mail Growth of nano-crystalline diamond on single-crystalline diamond by CVD method
- Авторы: Ashkinazi E.E.1,2, Sedov V.S.1,2, Khmelnitsky R.A.3,4,5, Khomich A.A.1,2, Khomich A.V.1,2,3,4, Ralchenko V.G.1,2,6
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Учреждения:
- Prokhorov General Physics Institute
- National Research Nuclear University “MEPhI”
- Lebedev Physical Institute
- Kotel’nikov Institute of Radio Engineering and Electronics
- Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)
- Harbin Institute of Technology
- Выпуск: Том 43, № 12 (2016)
- Страницы: 378-381
- Раздел: Article
- URL: https://journals.rcsi.science/1068-3356/article/view/228184
- DOI: https://doi.org/10.3103/S1068335616120101
- ID: 228184
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Аннотация
Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate.
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Об авторах
E. Ashkinazi
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
Россия, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
V. Sedov
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
Россия, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
R. Khmelnitsky
Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics; Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI)
Автор, ответственный за переписку.
Email: roma@sci.lebedev.ru
Россия, Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190; ul. Pushkovykh 12, Troitsk, Moscow oblast, 142190
A. Khomich
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: roma@sci.lebedev.ru
Россия, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
A. Khomich
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Lebedev Physical Institute; Kotel’nikov Institute of Radio Engineering and Electronics
Email: roma@sci.lebedev.ru
Россия, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Leninskii pr. 53, Moscow, 119991; Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190
V. Ralchenko
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”; Harbin Institute of Technology
Email: roma@sci.lebedev.ru
Россия, ul. Vavilova 38, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409; Nan Gang District, West Dazhi Street, 92, Shenzhen, Harbin, 518055
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