Analysis of characteristics of photodetectors based on InGaAs heteroepitaxial structures for 3D imaging
- 作者: Iakovleva N.1, Boltar K.1,2, Sednev M.1, Nikonov A.1,2
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隶属关系:
- Orion R&P Association
- Moscow Institute of Physics and Technology
- 期: 卷 62, 编号 9 (2017)
- 页面: 1061-1065
- 栏目: Articles from the Russian Journal Uspekhi Prikladnoi Fiziki
- URL: https://journals.rcsi.science/1064-2269/article/view/198789
- DOI: https://doi.org/10.1134/S1064226917090200
- ID: 198789
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详细
The 320 × 256 focal plane arrays based on р+-B–n-N+ tetralayer heterostructures with a wide-gap barrier layer have been investigated. The heterostructures with a narrow-gap n-InGaAs absorbing layer were grown by means of metalorganic vapor phase epitaxy on InP substrates. The band discontinuity between the In0.53Ga0.47As absorbing layer and the In0.52Al0.48As barrier layer is removed by growing a thin four-component n-AlInGaAs layer with the bandgap gradient variation. Delta-doped layers included into the heterostructures make it possible to lower the barrier in the valence band and eliminate the nonmonotonicity of energy levels. The experimental study of the dark current has been performed. It has been revealed that the average value of the dark current does not exceed 10 fA for the photodiode arrays with a pitch of 30 μm.
作者简介
N. Iakovleva
Orion R&P Association
编辑信件的主要联系方式.
Email: orion@orion-ir.ru
俄罗斯联邦, Moscow, 111538
K. Boltar
Orion R&P Association; Moscow Institute of Physics and Technology
Email: orion@orion-ir.ru
俄罗斯联邦, Moscow, 111538; Moscow oblast, Dolgoprudnyi, 141700
M. Sednev
Orion R&P Association
Email: orion@orion-ir.ru
俄罗斯联邦, Moscow, 111538
A. Nikonov
Orion R&P Association; Moscow Institute of Physics and Technology
Email: orion@orion-ir.ru
俄罗斯联邦, Moscow, 111538; Moscow oblast, Dolgoprudnyi, 141700