Structural properties of cadmium–zinc–tellurium substrates for growth of mercury–cadmiumtellurium solid solutions
- 作者: Pryanikova E.1, Mirofyanchenko A.1, Burlakov I.1, Smirnova N.2, Silina A.2, Grishechkin M.2, Denisov I.2, Shmatov N.2
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隶属关系:
- Orion Research and Production Association
- GIREDMET Federal State Research and Design Institute of Rare Metal Industry
- 期: 卷 62, 编号 3 (2017)
- 页面: 321-325
- 栏目: Articles from the Russian Journal Prikladnaya Fizika
- URL: https://journals.rcsi.science/1064-2269/article/view/198155
- DOI: https://doi.org/10.1134/S1064226917030184
- ID: 198155
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详细
Experimental results of the investigation and analysis of structural properties of cadmium–zinc–tellurium (CZT) substrates intended for the cadmium–mercury–tellurium (MCT) epitaxy by the methods of X-ray diffraction, selective etching, and infrared (IR) microscopy are considered. A relation between the shape and the full width at half-maximum (FWHM) of the rocking curve with structural defects, which are present in the material, is demonstrated. Precipitates and inclusions of the second phase, which are present in the substrate material in the amount of 102–104 cm–2, do not affect values of the FWHM of the rocking curve. Broadening of the rocking curve is caused by either high density of dislocations (>8 × 105) or the cellular property of their distribution. Maps of the FWHM distribution of the rocking curve for determination of structural perfection throughout the entire areas of the samples allowing evaluation of the suitability of wafers for subsequent technological process have been made.
作者简介
E. Pryanikova
Orion Research and Production Association
编辑信件的主要联系方式.
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 111538
A. Mirofyanchenko
Orion Research and Production Association
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 111538
I. Burlakov
Orion Research and Production Association
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 111538
N. Smirnova
GIREDMET Federal State Research and Design Institute of Rare Metal Industry
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 119017
A. Silina
GIREDMET Federal State Research and Design Institute of Rare Metal Industry
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 119017
M. Grishechkin
GIREDMET Federal State Research and Design Institute of Rare Metal Industry
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 119017
I. Denisov
GIREDMET Federal State Research and Design Institute of Rare Metal Industry
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 119017
N. Shmatov
GIREDMET Federal State Research and Design Institute of Rare Metal Industry
Email: pryanikova@gmail.com
俄罗斯联邦, Moscow, 119017