Device for nanoobject manipulation based on two-layer composite with shape memory
- Autores: Dikan V.1, Mashirov A.2, Zakharov D.1, Mazaev P.2, Zhikharev A.2, Kalashnikov V.2, Koledov V.2, von Gratovski S.2, Sitnikov N.3, Irzhak A.1,4, Shelyakov A.3, Shavrov V.2
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Afiliações:
- National University of Science and Technology MISiS
- Kotel’nikov Institute of Radio Engineering and Electronics
- National Research Nuclear University MEPhI
- Institute of Microelectronic Technology and Ultrapure Materials
- Edição: Volume 61, Nº 3 (2016)
- Páginas: 302-310
- Seção: Novel Radio Systems and Elements
- URL: https://journals.rcsi.science/1064-2269/article/view/196828
- DOI: https://doi.org/10.1134/S1064226916030086
- ID: 196828
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Resumo
A device for gripping of microand nanoobjects (nanotweezers) with a working body made of bimetal composite (fast-quenched Ti2NiCu alloy with shape memory and platinum layer) is developed and studied. A method for manufacturing of the composite material using local ion etching and ion-stimulated deposition from gas phase is proposed. A structure of nanotweezers based on such a composite and experiments on gripping and displacement of submicron objects are presented.
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Sobre autores
V. Dikan
National University of Science and Technology MISiS
Email: victor_koledov@mail.ru
Rússia, Leninskii pr. 4, Moscow, 119991
A. Mashirov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Rússia, Mokhovaya ul. 11, str. 7, Moscow, 125009
D. Zakharov
National University of Science and Technology MISiS
Email: victor_koledov@mail.ru
Rússia, Leninskii pr. 4, Moscow, 119991
P. Mazaev
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Rússia, Mokhovaya ul. 11, str. 7, Moscow, 125009
A. Zhikharev
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Rússia, Mokhovaya ul. 11, str. 7, Moscow, 125009
V. Kalashnikov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Rússia, Mokhovaya ul. 11, str. 7, Moscow, 125009
V. Koledov
Kotel’nikov Institute of Radio Engineering and Electronics
Autor responsável pela correspondência
Email: victor_koledov@mail.ru
Rússia, Mokhovaya ul. 11, str. 7, Moscow, 125009
S. von Gratovski
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Rússia, Mokhovaya ul. 11, str. 7, Moscow, 125009
N. Sitnikov
National Research Nuclear University MEPhI
Email: victor_koledov@mail.ru
Rússia, Kashirskoe sh. 31, Moscow, 115409
A. Irzhak
National University of Science and Technology MISiS; Institute of Microelectronic Technology and Ultrapure Materials
Email: victor_koledov@mail.ru
Rússia, Leninskii pr. 4, Moscow, 119991; ul. Akademika Osip’yana 6, Chernogolovka, Moscow oblast, 142432
A. Shelyakov
National Research Nuclear University MEPhI
Email: victor_koledov@mail.ru
Rússia, Kashirskoe sh. 31, Moscow, 115409
V. Shavrov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Rússia, Mokhovaya ul. 11, str. 7, Moscow, 125009