The improved resonator method for measuring the complex permittivity of materials

Abstract

An improved resonator method for determination of the complex permittivity of materials in a reflective resonator is presented. The method is specific in the following. In the obtained relationship, imaginary part ε₂ of the permittivity of an investigated material is determined using the variation of the resonance frequency and coupling coefficient of the resonator observed when a specimen is introduced, which increases the measurement accuracy. The method is approbated in the investigations of high-resistance silicon specimens.