Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature
- 作者: Mahdi O.1,2, Malyar I.1, Galushka V.1, Smirnov A.1, Sinev I.1, Venig S.1
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隶属关系:
- Chernyshevsky State University of Saratov
- Al-Muthanna University
- 期: 卷 43, 编号 6 (2017)
- 页面: 531-534
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/204893
- DOI: https://doi.org/10.1134/S1063785017060104
- ID: 204893
如何引用文章
详细
Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the films are composed of nanodimensional rod-like grains oriented normally to the substrate. The grains are separated by pores piercing the whole film. It was found that the grain diameter distribution is normal logarithmic one with several centers related as small integers, which indicates that the grains coalesce. The minimum grain size of 6 nm might correspond to the critical nucleus size under the used conditions of film deposition.
作者简介
O. Mahdi
Chernyshevsky State University of Saratov; Al-Muthanna University
Email: imalyar@yandex.ru
俄罗斯联邦, Saratov; Samawah
I. Malyar
Chernyshevsky State University of Saratov
编辑信件的主要联系方式.
Email: imalyar@yandex.ru
俄罗斯联邦, Saratov
V. Galushka
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
俄罗斯联邦, Saratov
A. Smirnov
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
俄罗斯联邦, Saratov
I. Sinev
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
俄罗斯联邦, Saratov
S. Venig
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
俄罗斯联邦, Saratov