Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature
- Authors: Mahdi O.S.1,2, Malyar I.V.1, Galushka V.V.1, Smirnov A.V.1, Sinev I.V.1, Venig S.B.1
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Affiliations:
- Chernyshevsky State University of Saratov
- Al-Muthanna University
- Issue: Vol 43, No 6 (2017)
- Pages: 531-534
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/204893
- DOI: https://doi.org/10.1134/S1063785017060104
- ID: 204893
Cite item
Abstract
Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the films are composed of nanodimensional rod-like grains oriented normally to the substrate. The grains are separated by pores piercing the whole film. It was found that the grain diameter distribution is normal logarithmic one with several centers related as small integers, which indicates that the grains coalesce. The minimum grain size of 6 nm might correspond to the critical nucleus size under the used conditions of film deposition.
About the authors
O. S. Mahdi
Chernyshevsky State University of Saratov; Al-Muthanna University
Email: imalyar@yandex.ru
Russian Federation, Saratov; Samawah
I. V. Malyar
Chernyshevsky State University of Saratov
Author for correspondence.
Email: imalyar@yandex.ru
Russian Federation, Saratov
V. V. Galushka
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
Russian Federation, Saratov
A. V. Smirnov
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
Russian Federation, Saratov
I. V. Sinev
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
Russian Federation, Saratov
S. B. Venig
Chernyshevsky State University of Saratov
Email: imalyar@yandex.ru
Russian Federation, Saratov