The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering
- Авторы: Tumarkin A.1, Razumov S.1, Gagarin A.1, Altynnikov A.1, Stozharov V.2, Kaptelov E.3, Senkevich S.3, Pronin I.3
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Учреждения:
- St. Petersburg State Electrotechnical University
- Herzen State Pedagogical University
- Ioffe Physical Technical Institute
- Выпуск: Том 42, № 2 (2016)
- Страницы: 143-145
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/197105
- DOI: https://doi.org/10.1134/S1063785016020140
- ID: 197105
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Аннотация
Submicron thin layers of BaZrxTi1–xO3 are grown in-situ by RF magnetron sputtering of a ceramic target (x = 0.50) on a substrate of Pt/r-cut leucosapphire Al2O3. It is shown that the composition of the ferroelectric layer is not identical to the composition of the sputtered target and is shifted toward barium zirconate. The reasons for such behavior are discussed. The obtained samples are characterized by high breakdown voltages (1 MV/cm and higher). The structural and high-frequency dielectric properties are studied, and high tunability of the capacitance of thin layers is revealed.
Об авторах
A. Tumarkin
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 197376
S. Razumov
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 197376
A. Gagarin
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 197376
A. Altynnikov
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 197376
V. Stozharov
Herzen State Pedagogical University
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 191186
E. Kaptelov
Ioffe Physical Technical Institute
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 194021
S. Senkevich
Ioffe Physical Technical Institute
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 194021
I. Pronin
Ioffe Physical Technical Institute
Автор, ответственный за переписку.
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 194021