The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering
- Authors: Tumarkin A.V.1, Razumov S.V.1, Gagarin A.G.1, Altynnikov A.G.1, Stozharov V.M.2, Kaptelov E.Y.3, Senkevich S.V.3, Pronin I.P.3
-
Affiliations:
- St. Petersburg State Electrotechnical University
- Herzen State Pedagogical University
- Ioffe Physical Technical Institute
- Issue: Vol 42, No 2 (2016)
- Pages: 143-145
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/197105
- DOI: https://doi.org/10.1134/S1063785016020140
- ID: 197105
Cite item
Abstract
Submicron thin layers of BaZrxTi1–xO3 are grown in-situ by RF magnetron sputtering of a ceramic target (x = 0.50) on a substrate of Pt/r-cut leucosapphire Al2O3. It is shown that the composition of the ferroelectric layer is not identical to the composition of the sputtered target and is shifted toward barium zirconate. The reasons for such behavior are discussed. The obtained samples are characterized by high breakdown voltages (1 MV/cm and higher). The structural and high-frequency dielectric properties are studied, and high tunability of the capacitance of thin layers is revealed.
About the authors
A. V. Tumarkin
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 197376
S. V. Razumov
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 197376
A. G. Gagarin
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 197376
A. G. Altynnikov
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 197376
V. M. Stozharov
Herzen State Pedagogical University
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 191186
E. Yu. Kaptelov
Ioffe Physical Technical Institute
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
S. V. Senkevich
Ioffe Physical Technical Institute
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
I. P. Pronin
Ioffe Physical Technical Institute
Author for correspondence.
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021