Atomic-Force Microscopy Probe-Activated Morphological Transformations in a Nanophase Copper Wetting Layer on Silicon
- Авторлар: Plusnin N.1, Maslov A.1
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Мекемелер:
- Institute of Automation and Control Processes
- Шығарылым: Том 44, № 3 (2018)
- Беттер: 187-190
- Бөлім: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/207424
- DOI: https://doi.org/10.1134/S1063785018030094
- ID: 207424
Дәйексөз келтіру
Аннотация
The phase transition of the nanophase Cu2Si wetting layer on a Si(001) substrate to more stable Cu silicide has been selectively activated by atomic-force microscopy in air. The transition is accompanied by an increase in the lateral size and height of grains and a decrease in their density. The effect that has been identified can be used to form ordered nanoisland ensembles and in nanolithography.
Авторлар туралы
N. Plusnin
Institute of Automation and Control Processes
Хат алмасуға жауапты Автор.
Email: plusnin@iacp.dvo.ru
Ресей, Vladivostok, 690041
A. Maslov
Institute of Automation and Control Processes
Email: plusnin@iacp.dvo.ru
Ресей, Vladivostok, 690041