Atomic-Force Microscopy Probe-Activated Morphological Transformations in a Nanophase Copper Wetting Layer on Silicon
- Authors: Plusnin N.I.1, Maslov A.M.1
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Affiliations:
- Institute of Automation and Control Processes
- Issue: Vol 44, No 3 (2018)
- Pages: 187-190
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/207424
- DOI: https://doi.org/10.1134/S1063785018030094
- ID: 207424
Cite item
Abstract
The phase transition of the nanophase Cu2Si wetting layer on a Si(001) substrate to more stable Cu silicide has been selectively activated by atomic-force microscopy in air. The transition is accompanied by an increase in the lateral size and height of grains and a decrease in their density. The effect that has been identified can be used to form ordered nanoisland ensembles and in nanolithography.
About the authors
N. I. Plusnin
Institute of Automation and Control Processes
Author for correspondence.
Email: plusnin@iacp.dvo.ru
Russian Federation, Vladivostok, 690041
A. M. Maslov
Institute of Automation and Control Processes
Email: plusnin@iacp.dvo.ru
Russian Federation, Vladivostok, 690041