Atomic-Force Microscopy Probe-Activated Morphological Transformations in a Nanophase Copper Wetting Layer on Silicon
- 作者: Plusnin N.1, Maslov A.1
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隶属关系:
- Institute of Automation and Control Processes
- 期: 卷 44, 编号 3 (2018)
- 页面: 187-190
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/207424
- DOI: https://doi.org/10.1134/S1063785018030094
- ID: 207424
如何引用文章
详细
The phase transition of the nanophase Cu2Si wetting layer on a Si(001) substrate to more stable Cu silicide has been selectively activated by atomic-force microscopy in air. The transition is accompanied by an increase in the lateral size and height of grains and a decrease in their density. The effect that has been identified can be used to form ordered nanoisland ensembles and in nanolithography.
作者简介
N. Plusnin
Institute of Automation and Control Processes
编辑信件的主要联系方式.
Email: plusnin@iacp.dvo.ru
俄罗斯联邦, Vladivostok, 690041
A. Maslov
Institute of Automation and Control Processes
Email: plusnin@iacp.dvo.ru
俄罗斯联邦, Vladivostok, 690041