Modification of the properties of vanadium dioxide by plasma-immersion ion implantation
- Авторлар: Burdyukh S.1, Stefanovich G.1, Pergament A.1, Berezina O.1, Avdeev N.1, Cheremisin A.1
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Мекемелер:
- Petrozavodsk State University
- Шығарылым: Том 42, № 1 (2016)
- Беттер: 32-35
- Бөлім: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/196720
- DOI: https://doi.org/10.1134/S1063785016010041
- ID: 196720
Дәйексөз келтіру
Аннотация
The effect of hydrogenation of thin films of vanadium dioxide by plasma-immersion ion implantation on their conductivity is characterized. It is demonstrated that the parameters of the metal–insulator phase transition observed in VO2 films depend on the irradiation dose. If the dose exceeds a certain threshold, film metallization occurs and the phase transition vanishes. The time of retention of hydrogen within films is considerably longer than that typical for other hydrogenation methods.
Авторлар туралы
S. Burdyukh
Petrozavodsk State University
Хат алмасуға жауапты Автор.
Email: burduch@gmail.com
Ресей, Petrozavodsk, 185910
G. Stefanovich
Petrozavodsk State University
Email: burduch@gmail.com
Ресей, Petrozavodsk, 185910
A. Pergament
Petrozavodsk State University
Email: burduch@gmail.com
Ресей, Petrozavodsk, 185910
O. Berezina
Petrozavodsk State University
Email: burduch@gmail.com
Ресей, Petrozavodsk, 185910
N. Avdeev
Petrozavodsk State University
Email: burduch@gmail.com
Ресей, Petrozavodsk, 185910
A. Cheremisin
Petrozavodsk State University
Email: burduch@gmail.com
Ресей, Petrozavodsk, 185910