Email this article Creating Lithographic Pictures Using Faceted Zinc Oxide Microparticles on a Silicon Substrate
- Authors: Bobkov A.A.1,2, Pronin I.A.1,2, Moshnikov V.A.1,2, Yakushova N.D.1, Karmanov A.A.1, Averin I.A.1, Somov P.A.2, Terukov E.I.3
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Affiliations:
- Penza State University
- St. Petersburg State Electrotechnical University LETI
- Ioffe Physical Technical Institute
- Issue: Vol 44, No 8 (2018)
- Pages: 694-696
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/207826
- DOI: https://doi.org/10.1134/S1063785018080047
- ID: 207826
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Abstract
Lithography techniques compatible with silicon technology have been developed within the hydrothermal method. Topological layouts were formed by faceted microcrystals with the developed surface. The prospects for implementing new hierarchical structures are of special interest.
About the authors
A. A. Bobkov
Penza State University; St. Petersburg State Electrotechnical University LETI
Email: pronin_i90@mail.ru
Russian Federation, Penza, 440026; St. Petersburg, 197022
I. A. Pronin
Penza State University; St. Petersburg State Electrotechnical University LETI
Author for correspondence.
Email: pronin_i90@mail.ru
Russian Federation, Penza, 440026; St. Petersburg, 197022
V. A. Moshnikov
Penza State University; St. Petersburg State Electrotechnical University LETI
Email: pronin_i90@mail.ru
Russian Federation, Penza, 440026; St. Petersburg, 197022
N. D. Yakushova
Penza State University
Email: pronin_i90@mail.ru
Russian Federation, Penza, 440026
A. A. Karmanov
Penza State University
Email: pronin_i90@mail.ru
Russian Federation, Penza, 440026
I. A. Averin
Penza State University
Email: pronin_i90@mail.ru
Russian Federation, Penza, 440026
P. A. Somov
St. Petersburg State Electrotechnical University LETI
Email: pronin_i90@mail.ru
Russian Federation, St. Petersburg, 197022
E. I. Terukov
Ioffe Physical Technical Institute
Email: pronin_i90@mail.ru
Russian Federation, St. Petersburg, 194021
