X-Ray Diagnostics of Microstructure Defects of Silicon Crystals Irradiated by Hydrogen Ions
- Authors: Asadchikov V.E.1, D’yachkova I.G.1, Zolotov D.A.1, Krivonosov Y.S.1, Chukhovskii F.N.1
-
Affiliations:
- Shubnikov Institute of Crystallography, Federal Scientific Research Center Crystallography and Photonics, Russian Academy of Sciences
- Issue: Vol 64, No 5 (2019)
- Pages: 680-685
- Section: Physical Science of Materials
- URL: https://journals.rcsi.science/1063-7842/article/view/203426
- DOI: https://doi.org/10.1134/S1063784219050049
- ID: 203426
Cite item
Abstract
Features of formation and transformation of radiation defects in near-surface layers of silicon plates that are implanted with hydrogen ions are studied. Using the method of high-resolution double-crystal X-ray diffractometry, values of the main parameters, such as mean effective thickness Leff and mean relative deformation Δa/a of a doped layer, are determined depending on the implantation dose and substrate temperature.
About the authors
V. E. Asadchikov
Shubnikov Institute of Crystallography, Federal Scientific Research Center Crystallography and Photonics,Russian Academy of Sciences
Author for correspondence.
Email: sig74@mail.ru
Russian Federation, Moscow, 119333
I. G. D’yachkova
Shubnikov Institute of Crystallography, Federal Scientific Research Center Crystallography and Photonics,Russian Academy of Sciences
Email: sig74@mail.ru
Russian Federation, Moscow, 119333
D. A. Zolotov
Shubnikov Institute of Crystallography, Federal Scientific Research Center Crystallography and Photonics,Russian Academy of Sciences
Email: sig74@mail.ru
Russian Federation, Moscow, 119333
Yu. S. Krivonosov
Shubnikov Institute of Crystallography, Federal Scientific Research Center Crystallography and Photonics,Russian Academy of Sciences
Email: sig74@mail.ru
Russian Federation, Moscow, 119333
F. N. Chukhovskii
Shubnikov Institute of Crystallography, Federal Scientific Research Center Crystallography and Photonics,Russian Academy of Sciences
Email: sig74@mail.ru
Russian Federation, Moscow, 119333